<?xml version="1.0" encoding="UTF-8"?><xml><records><record><source-app name="Biblio" version="6.x">Drupal-Biblio</source-app><ref-type>17</ref-type><contributors><authors><author><style face="normal" font="default" size="100%">E. Yin</style></author><author><style face="normal" font="default" size="100%">Michael D. Rubin</style></author><author><style face="normal" font="default" size="100%">C. Bradford Hopper</style></author></authors></contributors><titles><title><style face="normal" font="default" size="100%">On-Axis Shielded Sputtering of Y-Ba-Cu-O</style></title><secondary-title><style face="normal" font="default" size="100%">Mater. Lett</style></secondary-title></titles><dates><year><style  face="normal" font="default" size="100%">1991</style></year></dates><urls><related-urls><url><style face="normal" font="default" size="100%">http://eetd.lbl.gov/sites/all/files/publications/31017.pdf</style></url></related-urls></urls><volume><style face="normal" font="default" size="100%">13</style></volume><pages><style face="normal" font="default" size="100%">89</style></pages><language><style face="normal" font="default" size="100%">eng</style></language><abstract><style face="normal" font="default" size="100%">&lt;p&gt;In the standard process for sputtering of YBCO, the substrate is located off the axis of the target. High pressures are used to avoid and slow bombardment of the growing film by high-energy oxygen atoms. Using a particle shield and dc bias, we have deposited high quality YBCO films on axis at significantly reduced pressures. Typically these films have better and more repeatable electrical properties than off-axis films, and deposition rates are 2 to 3 times faster. Even more important is the return to a geometry that is inherently scalable to large-area deposition.&lt;/p&gt;</style></abstract><call-num><style face="normal" font="default" size="100%">LBL-31017</style></call-num><custom1><style face="normal" font="default" size="100%">&lt;p&gt;Windows and Daylighting Group&lt;/p&gt;</style></custom1><custom2><style face="normal" font="default" size="100%">LBL-31017</style></custom2></record></records></xml>