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Chan, James S., T. C. Fu, Nathan W. Cheung, Jennifer T. Ross, Nathan Newman, and Michael D. Rubin. "\i Comparison of AIN Films Grown by RF at Magnetron Sputtering and Ion-Assisted Molecular Beam Epitaxy\i0 ." In \i MRS Proceedings\i0 . Vol. 300., 1994.\par \par }