Heat transfer in excimer laser melting of thin polysilicon layers
| Title | Heat transfer in excimer laser melting of thin polysilicon layers |
| Publication Type | Journal Article |
| Year of Publication | 1995 |
| Authors | Xu, X., Costas P. Grigoropoulos, and Richard E. Russo |
| Secondary Title | Journal of Heat Transfer |
| Volume | 117 |
| Pagination | 708-715 |
| Publication Language | eng |
| Accession Number | 52 |
| Keywords | excimer, excimer laser, excimer-laser, heat, heat-transfer, laser, layer, layers, melting, thin |
| Notes | NOT IN FILE |
| Citation Key | 14560 |
