Ion-assisted pulsed-laser deposition for the fabrication of Y-Ba-Cu-O multilayer structures using oriented intermediate layers of YSZ and CeO2

TitleIon-assisted pulsed-laser deposition for the fabrication of Y-Ba-Cu-O multilayer structures using oriented intermediate layers of YSZ and CeO2
Publication TypeJournal Article
Year of Publication1996
AuthorsReade, R. P., and Richard E. Russo
Secondary TitleApplied Surface Science
Volume96-8
Pagination726-730
Publication Languageeng
Accession Number70
Keywordsablation, alloys, amorphous, applications, bombardment, ceo2, composition, critical current densities, critical-current-density, current-density, density, deposition, dielectric, fabrication, film, high temperature, high-temperature, intermediate, k, laser, laser ablation, laser deposition, laser-ablation, layer, layers, m, mu-m, multichip modules, multilayers, oriented, pld, polycrystalline, pulsed laser, pulsed laser deposition, pulsed-laser, pulsed-laser deposition, pulsed-laser-deposition, sio2, structure, substrate, substrates, superconducting, technology, temperature, thin, thin film, thin-film, thin-films, time, y-ba-cu-o, ybacuo, ybco, ysz, yttria stabilized zirconia, yttria-stabilized zirconia, yttria-stabilized-zirconia, zirconia, zirconium
Abstract

One of the most significant recent applications of laser ablation is pulsed laser deposition (PLD), a powerful new technology for fabricating unique thin film compositions and structures. Ion-assisted PLD (IAPLD) enhances the capabilities of this technology by providing oriented thin-film structures on amorphous and randomly-ordered polycrystalline substrates. IAPLD is particularly well-suited for fabricating multilayer thin film structures suitable for high temperature superconducting multi-chip modules, We have fabricated such structures on 5.0 mu m SiO2 dielectric layers using IAPLD yttria-stabilized zirconia (YSZ) layers, obtaining critical current densities as high as 3 x 10(5) A/cm(2) at 77 K. We have also constructed YBCO/IAPLD-YSZ/SiO2/YSZ/YBCO/CeO2/YSZ and YBCO/IAPLD-YSZ/amorphous-YSZ/YBCO/CeO2/YSZ multilayers. In addition, we are working on IAPLD of oriented CeO2 layers to improve the YBCO critical current densities

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Citation Key14445