Early phase laser induced plasma diagnostics and mass removal during single-pulse laser ablation of silicon
| Title | Early phase laser induced plasma diagnostics and mass removal during single-pulse laser ablation of silicon |
| Publication Type | Journal Article |
| Year of Publication | 1999 |
| Authors | Liu, H. C., Xianglei Mao, Jong H. Yoo, and Richard E. Russo |
| Secondary Title | Spectrochimica Acta Part B-Atomic Spectroscopy |
| Volume | 54 |
| Pagination | 1607-1624 |
| Publication Language | eng |
| Accession Number | 109 |
| Keywords | 266 nm, ablation, c, ca, crater, critical temperature, density, deposition, diagnostic, diagnostics, e, electron, electron number densities, electron number density, electron-density, england, induced plasma, inverse bremsstrahlung, ionization, irradiance, laser, laser ablation, laser induced plasma, laser induced plasma spectroscopy, laser-ablation, laser-induced plasma, laser-induced plasmas, mass, mass removal, measurement, measurements, mechanism, mechanisms, nd:yag, nd:yag laser, number, number density, parameters, phase, plasma, plasma diagnostic, plasma diagnostics, plasma temperature, plasmas, region, removal, science, self-focusing, silicon, spectroscopy, temperature, threshold, time, usa, via, volume |
| Abstract | The electron number density and temperature during the early phase (< 300 ns) of laser-induced plasmas from silicon using a 266-nm, 3-ns Nd:YAG laser were deduced via spectroscopic methods. These parameters were measured as a function of delay time vs. irradiance in the range of 2-80 GW/cm(2), and compared with crater volume measurements. A dramatic change in plasma characteristics (electron number density, temperature, and degree of ionization) as well as a sharp increase of mass removal was observed when the irradiance was increased beyond a threshold of 20 GW/cm(2). Possible mechanisms such as inverse bremsstrahlung and self-regulation were used to describe these data in the low irradiance region. Laser self-focusing and critical temperature are discussed to explain the dramatic changes after the irradiance reaches the threshold. (C) 1999 Elsevier Science B.V. All rights reserved |
| Notes | LBNL-43861 NOT IN FILE |
| LBNL Report Number | LBNL-43861 |
| Citation Key | 14371 |
