|Title||Y-Ba-Cu-O superconducting films produced by long-pulse laser vaporization|
|Publication Type||Journal Article|
|Year of Publication||1989|
|Authors||Balooch, Mehdi, Donald R. Olander, and Richard E. Russo|
|Secondary Title||Applied Physics Letters|
|Keywords||film, films, laser, superconducting, superconducting films, vaporization, y-ba-cu-o, ybacuo|
Deposition of superconducting thin films from YBa2Cu3O7 targets using a long‐pulse (ms) Nd‐glass laser with 50 J/pulse energy has been demonstrated. The deposition rate was approximately 100 nm/pulse and the film stoichiometry was close to that of the target. Scanning electron microscopy revealed spherical inclusions in the film. Scanning tunneling microscopy in air showed a terrace‐ledge structure on the uniform portion of the film. A film produced by four pulses on a SrTiO3 substrate, held at 540 °C, and post‐annealed in O2 at 850 °C for about 2h exhibited an onset transition at 78 K and zero resistance at 61 K. This new approach can provide fast deposition rates and broad‐area film coverage per laser shot.
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