Y-Ba-Cu-O superconducting films produced by long-pulse laser vaporization

TitleY-Ba-Cu-O superconducting films produced by long-pulse laser vaporization
Publication TypeJournal Article
Year of Publication1989
AuthorsBalooch, Mehdi, Donald R. Olander, and Richard E. Russo
Secondary TitleApplied Physics Letters
Volume55
Issue2
Pagination197
Publication Languageeng
Keywordsfilm, films, laser, superconducting, superconducting films, vaporization, y-ba-cu-o, ybacuo
Abstract

Deposition of superconducting thin films from YBa2Cu3O7 targets using a long‐pulse (ms) Nd‐glass laser with 50 J/pulse energy has been demonstrated. The deposition rate was approximately 100 nm/pulse and the film stoichiometry was close to that of the target. Scanning electron microscopy revealed spherical inclusions in the film. Scanning tunneling microscopy in air showed a terrace‐ledge structure on the uniform portion of the film. A film produced by four pulses on a SrTiO3 substrate, held at 540 °C, and post‐annealed in O2 at 850 °C for about 2h exhibited an onset transition at 78 K and zero resistance at 61 K. This new approach can provide fast deposition rates and broad‐area film coverage per laser shot.

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URLhttp://dx.doi.org/10.1063/1.102405
Citation Key14191