Ion Implantation of Mg and C into GaN Films Grown by Ion-Assisted MBE

TitleIon Implantation of Mg and C into GaN Films Grown by Ion-Assisted MBE
Publication TypeJournal Article
LBNL Report NumberLBL-34414
Year of Publication1993
AuthorsRoss, Jennifer T., Michael D. Rubin, X. Yao, Nathan Newman, and Amy Moll