
| Title | High Quality GaN Grown by Reactive Sputtering |
| Publication Type | Journal Article |
| Year of Publication | 1991 |
| Authors | Ross, Jennifer T., and Michael D. Rubin |
| Secondary Title | Mater. Lett |
| Volume | 12 |
| Pagination | 215 |
| Publication Language | eng |
| Call Number | LBL-31726 |
| Abstract | Gallium nitride films were grown by reactive rf magnetron sputtering on sapphire substrates. Crystalline (1120) GaN films were obtained on (0112) sapphire at substratestemperatures between 640-680 OC. High N2 partial pressures are required to crystalize the GaN films. Nitrogen incorporation and crystal quality of GaN films are examined as a function of substrate temperature and nitrogen partial pressure. Band gaps of 3.4 eV, and photoluminescence peaks as narrow as 11 meV are reported for sputtered GaN films. |
| Custom 1 | Windows and Daylighting Group |
| LBNL Report Number | LBL-31726 |
| Citation Key | 11917 |
| Attachment | Size |
|---|---|
| 1.07 MB |