On March 15, 1999, Lawrence Berkeley National Laboratory hosted a workshop focused on energy efficiency in Cleanroom facilities. The workshop was held as part of a multiyear effort sponsored by the California Institute for Energy Efficiency, and the California Energy Commission. It is part of a project that concentrates on improving energy efficiency in Laboratory type facilities including cleanrooms. The project targets the broad market of laboratory and cleanroom facilities, and thus cross-cuts many different industries and institutions. This workshop was intended to raise awareness by sharing case study success stories, providing a fomm for industry networking on energy issues, contributing LBNL expertise in research to date, determining barriers to implementation and possible solutions, and soliciting input for further research.