Multiphoton laser processing is one of the rapidly advancing laser technologies, providing unique possibilities for the fabrication of two- and three-dimensional microstructures. Multiphoton material processing has very important advantages over processes based on single photon absorption: an increased spatial resolution and the possibility of photofabrication inside transparent materials. Due to nonlinear nature of multiphoton processing, applications of ultrashort laser systems allow one to overcome the diffraction limit and to produce high quality 3D microstructures with a sub-wavelength resolution. This is very powerful technology with many potential applications. In this presentation, recent results in multiphoton laser processing obtained at the Laser Zentrum Hannover will be reviewed.